Is the Phoenix sensor designed to be water or air-cooled?

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Both #

The sensor head can either using traditional water cooling (0.5 GPM @ 20 C), air cooling with the Colnatec Mirage air cooling device, or the user’s facility compressed air/nitrogen cooling system.  Phoenix also employs a thermocouple to monitor the temperature of the sensor head during deposition. Monitoring temperature in this context contributes to deposition accuracy because temperature fluctuations during a process will have a detrimental influence on stability. Additionally, monitoring temperature has the added benefit of ensuring that any cooling system being used in the process is functioning correctly.


use mirage