Phoenix High Temperature Film Thickness Sensor PC-Based System

Description

Reliable, High-Temperature Film Thickness Monitoring for Demanding Deposition Processes

The Phoenix System offers the industry’s most affordable entry into high-performance thin film measurement—delivering precision, durability, and flexibility for applications reaching up to 500°C, including ALD, CVD, OVPD, and high-temp PVD.

Manufactured by Colnatec—the leader behind the world’s most advanced thin film sensor—the Phoenix combines proven sensor head engineering with Eon-LT electronics, a user-friendly PC interface, and Colnatec’s proprietary RC crystal technology. The result? A system built not only for performance but for process environments where lesser sensors routinely fail.

System Highlights

• High-Temperature Capability: Operates reliably in process environments up to 500°C—far beyond the limits of traditional sensors

• Proprietary Accuracy: Internal temperature measurement eliminates false readings from shutter opens, plasma events, and heat spikes

• Sensor Head Options: Choose from Parallel or Right Angle geometries and CF2.75″ or KF40 flanges to match your chamber

• Industry-Leading Crystal Support: Optimized for Colnatec RC Crystals, but compatible with any standard 14 mm crystal up to 10 MHz

• Compact, PC-Compatible Monitor/Controller: Eon-LT features Ethernet, USB, and WiFi connectivity in a small, rugged enclosure

• Optional Integrated Display: Available for standalone operation or remote chamber setups

• Dual Channel Capability: Expandability built in—control two sources or dual-crystal configurations

• Standard SMA Interface: Air-side connections make maintenance simple

What’s Included

Each CNT-Phoenix System includes:

• (1) Phoenix 500°C Sensor Head (your choice of configuration)

• (1) Eon LT Monitor or Eon LT Controller

• All required cables, software, and power supply

How to Order Your Phoenix System

To keep ordering simple, we’ve broken the Phoenix System into eight pre-configured packages. First, choose whether you need a Monitor (data only) or a Controller (data + process control). Then, pick the sensor head that fits your chamber setup.

Use the dropdown menus above to select your system configuration:

Step 1 – Select Your Electronics:

• ELT-M = Eon LT Monitor

• ELT-C = Eon LT Controller

Step 2 – Select Your Sensor Head:

• 1 = Parallel, CF2.75″, 3/16″ lines

• 2 = Parallel, KF40, 3/16″ lines

• 3 = Right Angle, CF2.75″, 3/16″ lines

• 4 = Right Angle, KF40, 3/16″ lines

📦 Example: Selecting “ELT-M-2” gets you the Monitor version with a parallel head on a KF40 flange.