“Ulvac-Style” 5 MHz AT-Cut Quartz Crystals – 12.5 mm, Fully Coated (Both Sides)

Description

These 5.000 MHz AT-cut quartz crystals are manufactured by Phillip Technologies to meet the unique requirements of Ulvac and Sloan QCM systems. With a compact 12.5 mm diameter and fully coated electrode surface on both sides, these crystals are ideal for high-precision thin film deposition in systems requiring full-surface contact.

Trusted by OEM replacement and custom QCM users alike, this style is commonly used in compact sensor heads, inline process monitors, and multi-crystal monitoring systems where chamber real estate is at a premium.

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Fully Coated Design

Unlike standard ring or anchor electrode styles, these crystals are:

• Fully metallized on both sides for maximum contact and signal stability

• Designed for specialized Ulvac and Sloan holders that rely on full-surface electrical contact

• Ideal for deposition systems where QCM heads are engineered for lower clearance or simplified contact mechanisms

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Technical Specifications

• Resonant Frequency: 5.000 MHz ±75 Hz

• Crystal Cut: AT

• Diameter: 12.5 mm

• Electrode Coverage: 100% both sides (full-face coating)

• Surface Finish: Precision-lapped

• Q-Factor: >70,000 typical

• Operating Temperature: Up to 150°C (crystal only)

• Pack Size: 10 crystals

Note: These are not compatible with 14 mm holders.

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Electrode Options

Available with the following coatings to match your deposition environment:

• Gold (Au): Chemically stable, ideal for corrosive or plasma-exposed environments

• Silver (Ag): Delivers the highest Q-factor; best for precision vacuum processes

• Aluminum (Al): Preferred for high-temperature and aluminum film applications

All electrodes are vacuum deposited and quality-checked for surface integrity and edge uniformity.

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Packaging

Every pack of 10 crystals is sealed in a cleanroom-compatible tray engineered to protect the active measurement area:

• Top Material: PETG pharmaceutical-grade lid

• Base Tray: Hand-cleaned polystyrene

• Designed to avoid contact with the central 3 mm resonating zone

• No anti-static PETG, avoiding polymer contamination or surface fogging

The result: dependable delivery of clean, accurate, ready-to-use QCM crystals.

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Applications

• Thin film monitoring in Ulvac and Sloan QCM systems

• Semiconductor and optical film deposition

• Compact chamber PVD and CVD setups

• Inline metrology in space-limited configurations

• OEM replacement in legacy or proprietary sensor designs

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Disclaimer:
Ulvac, Sloan, and other trademarks mentioned are the property of their respective owners. Phillip Technologies is not affiliated with or endorsed by these companies. References are provided for compatibility and descriptive purposes only.

Part Numbers:

TAN05SG: 5 MHz Ulvac AT Gold
TAN05SA: 5 MHz Ulvac AT Alloy
TAN05SS:  5 MHz Ulvac AT Silver