$99.95
Our most advanced radiation-compensated crystal. 6 MHz AT-cut quartz with double-anchor electrodes, built for stability at elevated temperatures. Ideal for Inficon, Maxtek, Sigma Instruments, and Sycon systems. 14 mm diameter. Cleanroom-ready 10-pack.
The 6 MHz RC Quartz Crystal is the pinnacle of high-temperature quartz sensor technology from Phillip Technologies. Designed for the most demanding thin film environments, it features our proprietary Radiation Compensated (RC) formulation, enabling clean, drift-free measurement even during aggressive thermal cycling, high-rate deposition, and plasma exposure.
Built on a 14 mm AT-cut quartz blank with a double-anchor electrode pattern (Inficon-style), this is the top-tier choice for customers using Inficon, Maxtek, Sigma Instruments, or Sycon QCM systems in high-energy or thermally extreme applications.
RC Crystal Technology Highlights
Developed to solve the shortcomings of standard AT-cut crystals, RC Crystals deliver:
Temperature stability up to 300°C
Immunity to radiation-induced rate spikes during shutter opening or plasma ignition
Stress resistance under heavy film deposition and sputtering
Superior long-term stability during extended runs or high-heat cycling
This crystal sets the standard for precision, durability, and signal clarity in modern thin film metrology.
Technical Specifications
Frequency: 6.000 MHz ±75 Hz
Crystal Cut: AT (RC enhanced)
Diameter: 14 mm
Electrode Pattern: Double-anchor (Inficon-style)
Operating Temp Range: 100°C to 300°C
Surface Finish: Precision-lapped
Q-Factor: >80,000 typical
Stress Sensitivity: Extremely low
Pack Size: 10 crystals
Electrode Coating Options
Available in your choice of:
Gold (Au): Best for corrosive or chemically reactive film processes, including ALD
Silver (Ag): Offers the highest Q-factor in clean vacuum environments
Aluminum (Al): Best thermal match to quartz, ideal for aluminum-target PVD or high-temp processes
Each electrode is precision-deposited via high-vacuum sputtering and inspected for uniformity, edge quality, and adhesion.
Packaging
Every 10-pack is housed in a cleanroom-compatible tray, engineered to protect the crystal’s critical sensing area:
Top: Rigid PETG pharmaceutical-grade lid
Base: Hand-cleaned polystyrene
Zero contact within 3 mm of the resonating center
No anti-static additives, ensuring absolute surface purity
This packaging system was designed specifically for sensitive metrology components and matches the same exacting standards as the crystals themselves.
Applications
High-temperature ALD and CVD
OLED, solar cell, and multilayer optical coatings
Thermal cycling, sputtering, and high-rate deposition
Any process requiring long-term signal stability at elevated temperatures
Advanced metrology in research or production environments
Disclaimer
Inficon, Maxtek, Sigma Instruments, Sycon, and other trademarks mentioned are the property of their respective owners. Phillip Technologies is not affiliated with or endorsed by these companies. References are provided solely for compatibility and descriptive purposes.
Datasheet Files:
TAN06RCG: 6 MHz Inficon Gold
TAN06RCA: 6 MHz Inficon Alloy
TAN06RCS: 6 MHz Inficon Silver
| Weight | .05 lbs |
|---|---|
| Dimensions | 3.75 × 3.75 × .35 in |
| Package Quantity | 10 pieces |
| Harmonized Code | 8541.90.0000 |
