$1,995.00
Engineered for precision under heat, the Phoenix sensor delivers unmatched thermal stability and real-time frequency correction for high-temperature deposition environments. Designed for use with 14 mm crystals and Colnatec’s Eon series monitors.
The Phoenix™ High-Temperature Film Thickness Sensor is engineered to outperform in thermal extremes where traditional sensors fail. Designed specifically for high-rate processes such as ALD, CVD, and OVPD, the Phoenix delivers stability, precision, and durability in one integrated system.
Temperature-induced frequency drift—often ignored in standard sensor heads—becomes a critical failure point during aggressive deposition. Phoenix directly measures crystal temperature at the source using a high-accuracy embedded Type K thermocouple, enabling real-time correction of rate, thickness, and frequency in deposition chambers operating up to 500°C. When paired with Colnatec’s Eon-LT™ or Eon-ID™ controllers, users gain full visibility and correction down to 0.001 Hz.
Key Technical Features:
True vacuum-grade construction with fully welded 304 stainless steel body
Embedded Type K thermocouple with chamber-side distribution node for ±1°C accuracy
Optical-grade screw-on crystal cap for secure, contamination-free handling
Compatible with standard 14 mm AT-cut crystals (up to 10 MHz)
Standard SMA connection for crystal signal; integrated thermocouple output
Available with 2.75″ ConFlat or KF-40 feedthroughs, as well as compression fitting variants
Custom options available for flanges, bends, and stem lengths
Performance Advantage:
Unlike water-cooled sensor heads that fail to address root causes of drift, Phoenix directly monitors and adjusts for temperature changes—delivering unmatched data fidelity. Welded seams and ultra-clean internal geometries ensure full vacuum compatibility and minimal outgassing, even during rapid thermal cycling or plasma exposure.
| Weight | 4 lbs |
|---|---|
| Dimensions | 36 × 4 × 4 in |
