$99.95
5 MHz RC (Radiation Compensated) quartz crystals with double-anchor electrode pattern for Inficon, Maxtek, Sigma Instruments, and Sycon QCM systems. Built for high-temp, high-precision deposition environments. 14 mm diameter, sold in cleanroom packs of 10.
These 5.000 MHz RC (Radiation Compensated) AT-cut quartz crystals are engineered by Phillip Technologies to maintain measurement accuracy and frequency stability under thermal stress. Built with a double-anchor electrode pattern, they are fully compatible with Inficon, Maxtek, Sigma Instruments, and Sycon deposition controllers and QCM systems.
RC technology addresses the limitations of standard crystals in high-energy deposition environments. These crystals are plasma-compatible, stress-insensitive, and immune to thermal radiation-induced drift, making them ideal for demanding thin film processes such as ALD, CVD, sputtering, and high-temperature PVD.
RC Crystal Advantage
Unlike conventional AT-cut quartz, RC crystals are specially formulated and processed to:
Resist frequency shift from radiant heat and source flux
Eliminate false rate spikes from shutter opens or plasma ignition
Remain stable under temperature cycling, ion bombardment, and film stress
Provide clean data for nanometer-scale control in high-precision coatings
These crystals are essential in any application where reliability during thermal extremes is critical.
Technical Specifications
Frequency: 5.000 MHz ±75 Hz
Crystal Cut: AT (RC formulation)
Diameter: 14 mm
Electrode Pattern: Double-anchor (Inficon-style)
Operating Temperature Range: 100°C to 300°C
Surface Finish: Precision-lapped
Q-Factor: >70,000 typical
Stress Sensitivity: Extremely low
Pack Size: 10 crystals
Electrode Options
Available with gold, silver, or aluminum electrodes:
Gold (Au): Excellent chemical resistance and thermal stability—ideal for ALD and aggressive vapor environments
Silver (Ag): Highest Q-factor—best for ultra-clean optical or semiconductor film work
Aluminum (Al): Strong thermal match with quartz—ideal for high-temp aluminum deposition or oxidation-resistant use
Each coating is vacuum-deposited with strict quality control over adhesion, uniformity, and edge cleanliness.
Packaging
Every 10-pack of crystals is enclosed in a cleanroom-compatible tray, engineered to maintain surface integrity:
Top: Rigid PETG pharmaceutical-grade plastic
Base: Hand-cleaned polystyrene
Designed to avoid contact within the central 3 mm active zone
No anti-static additives or polymer-based coatings that can leach onto the crystal surface
Our packaging reflects the same precision and care as the crystals themselves.
Applications
ALD and CVD thin film monitoring
High-temperature PVD and sputtering
Optical coating deposition
Semiconductor and OLED manufacturing
Thermal cycling and radiation-heavy environments
Systems requiring crystal stability beyond 100°C
Disclaimer:
Inficon, Maxtek, Sigma Instruments, Sycon, and other trademarks mentioned are the property of their respective owners. Phillip Technologies is not affiliated with or endorsed by these companies. References to third-party brands are provided solely for compatibility and descriptive purposes.
Datasheet Files:
TAN05RCIG: 5 MHz Inficon RC Gold
TAN05RCIA: 5 MHz Inficon RC Alloy
TAN05RCIS: 5 MHz Inficon RC Silver
| Weight | .05 lbs |
|---|---|
| Dimensions | 3.75 × 3.75 × .35 in |
| Package Quantity | 10 pieces |
| Harmonized Code | 8541.90.0000 |
