Description
These 5.000 MHz AT-cut quartz crystals are engineered by Phillip Technologies for use in thin film monitors and deposition systems requiring a single-anchor electrode layout. Fully compatible with Balzers, Evatec, and other legacy-style controllers, they deliver high frequency stability and process reliability in demanding vacuum environments.
Each crystal is available with your choice of electrode coating—gold, silver, or aluminum—to meet the specific needs of your application.
Single Anchor Electrode Design
The single-anchor pattern features a central electrode surrounded by a grounded periphery, designed specifically for Balzers-style sensor heads. It offers:
-
Stable resonance in legacy sensor configurations
-
Minimal edge coupling and signal distortion
-
Reliable performance in fixed-mount, low-clearance holders
Technical Specifications
-
Resonant Frequency: 5.000 MHz ±75 Hz
-
Crystal Cut: AT
-
Diameter: 14 mm
-
Electrode Pattern: Single-anchor (Balzers-style)
-
Surface Finish: Precision-lapped (optically polished available on request)
-
Electrode Coatings: Gold (Au), Silver (Ag), or Aluminum (Al)
-
Q-Factor: >70,000 typical in air
-
Max Operating Temperature: 150°C (crystal only; holder-dependent)
-
Pack Size: 10 crystals
Electrode Material Options
-
Gold (Au): Highly inert, excellent in corrosive or reactive deposition environments
-
Silver (Ag): Delivers the highest Q-factor; ideal for high-precision optical and vacuum applications
-
Aluminum (Al): Thermally stable and ideal for high-temperature or aluminum-specific film monitoring
Each coating is vacuum deposited and quality-checked for adhesion, uniformity, and edge cleanliness.
Packaging
All crystals are shipped in cleanroom-ready trays specifically designed to preserve their integrity:
-
Top: Pharmaceutical-grade PETG
-
Base: Hand-cleaned polystyrene
-
No contact with the critical center region (within 3 mm of the resonance point)
-
No anti-static additives that risk contaminating the quartz surface
Our packaging reflects the same attention to detail as the crystals themselves, ensuring they arrive clean, safe, and ready for use.
Typical Applications
-
Optical film deposition using Balzers and Evatec controllers
-
Precision PVD coating processes
-
Semiconductor and MEMS fabrication
-
Legacy process systems requiring single-anchor compatibility
-
Thin film growth in industrial or research environments
Disclaimer:
Balzers, Evatec, and other trademarks mentioned are the property of their respective owners. Phillip Technologies is not affiliated with or endorsed by these companies. References to third-party brands are used solely to indicate compatibility.
Datasheet Files:
TAN05BG: 5 MHz Balzers Gold
TAN05BA: 5 MHz Balzers Alloy
TAN05BS: 5 MHz Balzers Silver