6 MHz High-Temperature (HT) Quartz Crystals

Description

Standard AT-cut crystals begin to fail above 100°C—generating noise, instability, and unreliable film thickness readings. The HT Series from Phillip Technologies is specifically engineered to maintain stable, accurate performance in environments ranging from 250°C to 400°C, making it the go-to solution for high-temperature QCM applications.

These 6.000 MHz AT-cut crystals feature a double-anchor electrode layout (Inficon-style) and are offered with gold, silver, or aluminum electrodes. Each crystal is stress-insensitive, plasma-compatible, and optimized for real-time measurements under thermal load, reactive atmospheres, and sputtering conditions.

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Why Use HT Crystals?

HT quartz crystals solve the most common problems encountered in high-temp deposition:

• Stable operation at up to 400°C—no frequency drift or signal breakdown

• Eliminates rate spikes caused by shutter opens, heat surges, or plasma ignition

• Stress-insensitive material formulation for durability under film growth strain

• Reduces sputtering noise from energetic ion impacts and film condensation

• Compatible with aggressive environments like selenium, sulfur, or metal chlorides

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Technical Specifications

• Frequency: 6.000 MHz ±75 Hz

• Crystal Cut: AT (HT formulation)

• Electrode Pattern: Double-anchor (Inficon-style)

• Diameter: 14 mm

• Operating Temperature Range: 100°C to 400°C

• Q-Factor: >80,000 typical (in high-temp configurations)

• Stress Sensitivity: Minimal to none under thermal cycling

• Pack Size: 10 crystals

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Electrode Options

• Gold (Au): Chemically inert and thermally stable—ideal for ALD, corrosive vapor processes, and organic film growth

• Silver (Ag): Highest Q-factor under clean vacuum conditions—preferred for optical and dielectric film work

• Aluminum (Al): Ideal for high-temperature sputtering and aluminum-involved processes; best thermal match to quartz

All electrodes are deposited in controlled vacuum environments and inspected for edge quality and adhesion.

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Recommended Applications

• Atomic Layer Deposition (ALD)

• Chemical Vapor Deposition (CVD)

• OVPD & PVD at elevated temps

• Furnace-based processes (selenization, indiffusion)

• OLED fabrication

• Optical interference coatings

• Solar cell layer formation

HT crystals integrate into most commercial QCM systems, but they perform best when paired with Colnatec high-temperature sensor heads or similarly rated hardware.

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Packaging

Each 10-pack is housed in a cleanroom-compatible tray designed for maximum crystal protection:

• Top: PETG pharmaceutical-grade lid

• Base: Hand-cleaned polystyrene

• No anti-static coatings, avoiding polymer leaching or fogging

• Non-contact center zone: Protects the measurement surface (3 mm radius)

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Disclaimer:
Colnatec, Inficon, and other trademarks mentioned are the property of their respective owners. Phillip Technologies is not affiliated with or endorsed by these companies. All brand references are for compatibility and descriptive purposes only.

Part Numbers:

TAN06HTIG: 6 MHz HT Inficon Gold
TAN06HTIA: 6 MHz HT Inficon Alloy
TAN06HTIS: 6 MHz HT Inficon Silver