Eon-LT Temperature-Compensated Film Thickness Monitor by Colnatec

Description

The Eon-LT by Colnatec is a next-generation, temperature-compensated film thickness monitor engineered for precision thin film deposition processes. Unlike conventional quartz crystal monitors, which rely solely on frequency shifts, the Eon-LT simultaneously measures both frequency and temperature, correcting for thermal drift that can distort film thickness and rate measurements—particularly in high-rate or high-temperature environments.

Why Temperature Matters:
Traditional QCM monitors assume stable crystal temperatures, often leading to errors of 10% or more during real-world operation. In some cases, thermal effects can completely mask true deposition rates. The Eon-LT solves this by continuously tracking the temperature of the crystal sensor and applying real-time corrections, ensuring accurate, reliable thickness measurements—even in demanding process conditions like ALD, CVD, and sputtering.

Key Features:

• Embedded temperature measurement for true frequency correction

• Dual-channel support for simultaneous monitoring

• RS-232, USB, and WiFi connectivity

• Compatible with Colnatec’s Phoenix sensor heads and proprietary software

• Relay support for shutter on/off control

• User-friendly interface or programmable via RS-232 protocol

System Options:

• Eon-LT Monitor – Internal Oscillator:
  Includes all hardware to connect directly to a sensor head. Recommended for installations where the unit is within 6–12″ of the feedthrough.

• Eon-LT Monitor – External Oscillator (Add $895):
  Electrically modified to support a separate external oscillator for setups requiring up to 10 feet of distance from the vacuum feedthrough. Requires compatible external oscillator package (sold separately).

Compatibility:
Optimized for use with Colnatec’s Phoenix sensor systems and supports standard 14 mm crystals up to 10 MHz. Contact us for custom integration support or application-specific recommendations.