“Ulvac-Style” 5 MHz RC Quartz Crystals – 12.5 mm, Fully Coated, High-Temperature & Rate-Spike Resistant

Description

These 5.000 MHz RC (Radiation Compensated) quartz crystals are precision-manufactured by Phillip Technologies to meet the demanding requirements of Ulvac and Sloan thin film deposition systems. With a compact 12.5 mm diameter and full-surface electrode coating on both sides, these crystals are ideal for high-precision thin film monitoring in systems requiring full-surface contact.

RC Crystal Technology, developed by our CTO, Scott Grimshaw, offers enhanced thermal radiation resistance, enabling the most accurate measurements possible in thin film deposition. Unlike traditional AT-cut crystals, RC crystals are insensitive to frequency shifts caused by source radiation or film stress, ensuring reliable data even during aggressive sputtering or thermal cycling.

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Key Features

• Radiation Compensation (RC) Design: Mitigates frequency shifts caused by thermal radiation and film stress, eliminating rate spikes during shutter operations.

• High-Temperature Stability: Operates reliably up to 300°C, making it suitable for high-temperature processes like ALD, CVD, and OVPD.

• Full-Surface Electrode Coating: Ensures maximum contact and signal stability in sensor heads designed for full-surface electrical contact.

• Compact 12.5 mm Diameter: Compatible with Ulvac and Sloan QCM systems requiring smaller crystal sizes.

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Technical Specifications

• Resonant Frequency: 5.000 MHz ±75 Hz

• Crystal Cut: AT (RC formulation)

• Diameter: 12.5 mm

• Electrode Coverage: 100% both sides (full-face coating)

• Operating Temperature Range: Up to 300°C

• Q-Factor: >70,000 typical

• Pack Size: 10 crystals

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Electrode Material Options

Available with the following coatings to match your deposition environment:

• Gold (Au): Chemically inert and thermally stable—ideal for ALD, corrosive vapor processes, and organic film growth.

• Silver (Ag): Delivers the highest Q-factor; best for precision vacuum processes.

• Aluminum (Al): Preferred for high-temperature and aluminum film applications.

All electrodes are vacuum deposited and quality-checked for surface integrity and edge uniformity.

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Packaging

Each pack of 10 crystals is enclosed in a cleanroom-compatible tray designed to preserve surface integrity:

• Top Material: Pharmaceutical-grade PETG

• Base Tray: Hand-cleaned polystyrene

• Designed to avoid contact with the central 3 mm resonating zone

• No anti-static coatings, avoiding polymer contamination or surface fogging

Our packaging reflects the same attention to detail as the crystals themselves, ensuring they arrive clean, safe, and ready for use.

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Applications

• Thin film monitoring in Ulvac and Sloan QCM systems

• High-temperature deposition processes (ALD, CVD, OVPD)

• Environments with significant thermal radiation exposure

• Processes requiring high precision and stability

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Disclaimer
Ulvac, Sloan, and other trademarks mentioned are the property of their respective owners. Phillip Technologies is not affiliated with or endorsed by these companies. References are provided for compatibility and descriptive purposes only.

Part Numbers:

TAN05RCSG: 5 MHz Ulvac RC Gold
TAN05RCSA: 5 MHz Ulvac RC Alloy
TAN05RCSS:  5 MHz Ulvac RC Silver