“Inficon-Style” 5 MHz RC Quartz Crystals – 14 mm, Double Anchor, High-Temperature Rated

Description

These 5.000 MHz RC (Radiation Compensated) AT-cut quartz crystals are engineered by Phillip Technologies to maintain measurement accuracy and frequency stability under thermal stress. Built with a double-anchor electrode pattern, they are fully compatible with Inficon, Maxtek, Sigma Instruments, and Sycon deposition controllers and QCM systems.

RC technology addresses the limitations of standard crystals in high-energy deposition environments. These crystals are plasma-compatible, stress-insensitive, and immune to thermal radiation-induced drift, making them ideal for demanding thin film processes such as ALD, CVD, sputtering, and high-temperature PVD.

---

RC Crystal Advantage

Unlike conventional AT-cut quartz, RC crystals are specially formulated and processed to:

• Resist frequency shift from radiant heat and source flux

• Eliminate false rate spikes from shutter opens or plasma ignition

• Remain stable under temperature cycling, ion bombardment, and film stress

• Provide clean data for nanometer-scale control in high-precision coatings

These crystals are essential in any application where reliability during thermal extremes is critical.

---

Technical Specifications

• Frequency: 5.000 MHz ±75 Hz

• Crystal Cut: AT (RC formulation)

• Diameter: 14 mm

• Electrode Pattern: Double-anchor (Inficon-style)

• Operating Temperature Range: 100°C to 300°C

• Surface Finish: Precision-lapped

• Q-Factor: >70,000 typical

• Stress Sensitivity: Extremely low

• Pack Size: 10 crystals

---

Electrode Options

Available with gold, silver, or aluminum electrodes:

• Gold (Au): Excellent chemical resistance and thermal stability—ideal for ALD and aggressive vapor environments

• Silver (Ag): Highest Q-factor—best for ultra-clean optical or semiconductor film work

• Aluminum (Al): Strong thermal match with quartz—ideal for high-temp aluminum deposition or oxidation-resistant use

Each coating is vacuum-deposited with strict quality control over adhesion, uniformity, and edge cleanliness.

---

Packaging

Every 10-pack of crystals is enclosed in a cleanroom-compatible tray, engineered to maintain surface integrity:

• Top: Rigid PETG pharmaceutical-grade plastic

• Base: Hand-cleaned polystyrene

• Designed to avoid contact within the central 3 mm active zone

• No anti-static additives or polymer-based coatings that can leach onto the crystal surface

Our packaging reflects the same precision and care as the crystals themselves.

---

Applications

• ALD and CVD thin film monitoring

• High-temperature PVD and sputtering

• Optical coating deposition

• Semiconductor and OLED manufacturing

• Thermal cycling and radiation-heavy environments

• Systems requiring crystal stability beyond 100°C

---

Disclaimer:
Inficon, Maxtek, Sigma Instruments, Sycon, and other trademarks mentioned are the property of their respective owners. Phillip Technologies is not affiliated with or endorsed by these companies. References to third-party brands are provided solely for compatibility and descriptive purposes.

Datasheet Files:

TAN05RCIG: 5 MHz Inficon RC Gold
TAN05RCIA: 5 MHz Inficon RC Alloy
TAN05RCIS:  5 MHz Inficon RC Silver