Description
These 5.000 MHz AT-cut quartz crystals are engineered by Phillip Technologies for compatibility with thin film deposition controllers from Inficon, Maxtek, Sigma Instruments, and Sycon. Featuring a standard 14 mm diameter and double-anchor electrode pattern, they are the industry-standard form factor for general-purpose film thickness monitoring.
Designed for stable performance across a wide range of vacuum deposition systems, these crystals provide reliable real-time feedback during evaporation, sputtering, and optical coating processes.
Double Anchor Electrode Pattern
The double-anchor design features:
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Two symmetrical inner electrodes for stable oscillation
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Balanced response under varying deposition angles
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Optimized compatibility with Inficon-style QCM heads and OEM hardware
This pattern is widely supported and offers consistent performance in both R&D and production environments.
Technical Specifications
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Resonant Frequency: 5.000 MHz ±75 Hz
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Crystal Cut: AT
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Diameter: 14 mm
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Electrode Pattern: Double-anchor (Inficon-style)
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Surface Finish: Precision-lapped
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Q-Factor: >70,000 typical
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Operating Temperature: Up to 150°C
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Pack Size: 10 crystals
Electrode Options
Available with the following standard coatings:
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Gold (Au): Chemically inert; ideal for reactive or corrosive deposition processes
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Silver (Ag): Highest Q-factor; excellent for clean vacuum applications and optical film control
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Aluminum (Al): Good thermal match; well-suited for high-temperature and aluminum-involved depositions
Each electrode type is vacuum-deposited and quality-checked for thickness, adhesion, and surface cleanliness.
Packaging
Each crystal is housed in a cleanroom-compatible tray to protect the sensitive active area:
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Top Shell: Rigid PETG pharmaceutical-grade plastic
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Base Tray: Hand-cleaned polystyrene
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No anti-static additives to avoid leaching or surface contamination
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Designed to avoid plastic contact with the central 3 mm sensing zone
This packaging system ensures each crystal arrives pristine and lab-ready.
Applications
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PVD and thermal evaporation
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Optical film deposition
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Semiconductor thin film growth
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Sputtering processes using Inficon or Maxtek monitors
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General vacuum metrology and film rate control
Disclaimer:
Inficon, Maxtek, Sigma Instruments, Sycon, and other trademarks mentioned are the property of their respective owners. Phillip Technologies is not affiliated with or endorsed by these companies. Brand references are used solely to indicate product compatibility.
Part Numbers:
TAN05IG: 6 MHz Inficon Gold
TAN05IA: 6 MHz Inficon Alloy
TAN05IS: 6 MHz Inficon Silver