Description
Designed and manufactured by Phillip Technologies, these 6.000 MHz AT-cut quartz crystals offer high frequency stability and precision performance in thin film deposition systems. With a double-anchor electrode layout, they are fully compatible with monitoring systems from Inficon, Maxtek, Sigma Instruments, Sycon, and other controllers using this industry-standard configuration.
With a 14 mm diameter and clean, reliable frequency response, these crystals are ideal for vacuum deposition, optical monitoring, and general thin-film growth across semiconductor, photonics, and advanced materials applications.
Technical Specifications
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Resonant Frequency: 6.000 MHz ±75 Hz
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Cut Type: AT
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Diameter: 14 mm
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Electrode Geometry: Double-anchor (Inficon-style)
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Surface Finish: Precision-lapped
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Temperature Range: Up to 150°C (crystal only; holder-dependent)
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Q-Factor: >70,000 typical (in air)
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Pack Size: 10 crystals per box
Electrode Coating Options
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Gold (Au): Chemically inert and ideal for corrosive or reactive film environments
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Silver (Ag): Delivers the highest Q-factor and best frequency response; preferred for high-precision PVD or optical film control
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Aluminum (Al): Recommended for high-temperature use or when monitoring aluminum-based films; offers low thermal expansion and strong process compatibility
Each metal option is vacuum deposited under tightly controlled conditions to ensure electrode uniformity and performance stability.
Packaging Overview
Our crystals are packaged in custom-designed trays that protect the sensitive center zone (within 3 mm of the resonating point) from any physical contact or contamination:
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Top Shell: Made from pharmaceutical-grade PETG plastic
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Base Tray: Hand-cleaned polystyrene for a dust- and residue-free finish
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No anti-static coatings or additives that could leach onto the crystal surface
This packaging was engineered with the same care and precision as the crystals themselves, ensuring readiness for use in cleanroom environments.
Disclaimer:
Inficon, Maxtek, Sigma Instruments, Sycon, and other trademarks mentioned are the property of their respective owners. Phillip Technologies is not affiliated with or endorsed by these companies. References to third-party brands are used solely to indicate product compatibility.
Datasheet Files:
TAN06IG: 6 MHz Inficon Gold
TAN06IA: 6 MHz Inficon Alloy
TAN06IS: 6 MHz Inficon Silver