“Balzers-Style” 5 MHz RC Quartz Crystals – 14 mm, Single Anchor, High-Temperature Rated

Description

These 5.000 MHz RC (Radiation Compensated) AT-cut quartz crystals are optimized for high-performance deposition systems requiring exceptional stability under thermal and process stress. Manufactured by Phillip Technologies, they feature a single-anchor electrode pattern and are fully compatible with Balzers, Evatec, and other legacy sensor heads using this configuration.

Built to perform in temperature ranges up to 300°C, RC crystals eliminate the false rate spikes and measurement instability typical of standard quartz under thermal radiation, plasma exposure, or aggressive sputtering conditions.

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RC Crystal Performance Advantages

• Thermal stability up to 300°C

• Eliminates false rate spikes from shutter opens and plasma ignition

• Immunity to film stress and heat-induced frequency drift

• Compatible with legacy QCM systems that use full-contact holders

These are ideal for environments where precision, signal clarity, and process repeatability are critical—especially when using compact or legacy mounting formats.

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Technical Specifications

• Frequency: 5.000 MHz ±75 Hz

• Crystal Cut: AT (RC formulation)

• Diameter: 14 mm

• Electrode Pattern: Single-anchor (Balzers-style)

• Operating Temp Range: 100°C to 300°C

• Surface Finish: Precision-lapped

• Q-Factor: >70,000 typical

• Pack Size: 10 crystals

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Electrode Coating Options

Choose the best match for your process environment:

• Gold (Au): Excellent resistance to corrosion and reactive species; reliable under thermal load

• Silver (Ag): Highest Q-factor; preferred in clean, high-precision vacuum processes

• Aluminum (Al): Best thermal compatibility with quartz; performs well in aluminum-based or high-temp depositions

All coatings are vacuum deposited and inspected for edge integrity and thickness uniformity.

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Packaging

Each 10-pack of crystals is sealed in a cleanroom-compatible tray, designed for critical protection:

• Top Lid: PETG pharmaceutical-grade plastic

• Base Tray: Hand-cleaned polystyrene

• Ensures no contact within the 3 mm active resonance zone

• No anti-static PETG or chemical leaching agents

Packaging reflects the same high standards as the crystals, ensuring your components arrive clean and application-ready.

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Applications

• High-temperature thin film deposition (ALD, CVD, sputtering)

• Legacy QCM heads from Balzers, Evatec, and similar platforms

• Environments requiring rate-stability and thermal resilience

• Optical coatings, semiconductors, advanced materials

• Precision QCM metrology in production and R&D

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Disclaimer
Balzers, Evatec, and other trademarks mentioned are the property of their respective owners. Phillip Technologies is not affiliated with or endorsed by these companies. References to third-party brands are provided solely to indicate product compatibility.

Part Numbers:

TAN05RCBG: 5 MHz Balzers Gold
TAN05RCBA:  5 MHz Balzers Alloy
TAN05RCBS:  5 MHz Balzers Silver