“Inficon-Style” 6 MHz Optically Polished AT-Cut Quartz Crystals – 14 mm

Description

These premium 6.000 MHz AT-cut quartz crystals from Phillip Technologies feature an optically polished surface and double-anchor electrode geometry—delivering exceptional performance in systems that demand clean frequency resolution and precise thickness monitoring.

Designed for compatibility with Inficon, Maxtek, Sigma Instruments, and Sycon monitors and controllers, these crystals are widely used in optical film monitoring, Atomic Layer Deposition (ALD), and ultrathin film characterization workflows where frequency stability and low noise are non-negotiable.

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Why Optically Polished Crystals?
Polished crystals offer superior performance over standard lapped or untreated crystals, with key benefits including:

• Reduced phase noise for clearer, more accurate readings

• Higher Q-factor due to smoother, defect-free surfaces

• Improved resistance to contamination, especially in long-duration or high-precision runs

• Better reproducibility between runs and across crystals—critical for optical coating and multilayer stacks

These properties make polished crystals ideal for optical monitoring, dielectric film growth, ALD step validation, and nanometer-scale thickness control.

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Technical Specifications

• Resonant Frequency: 6.000 MHz ±75 Hz

• Cut Type: AT

• Diameter: 14 mm

• Surface Finish: Optical polish (<10 Å RMS)

• Electrode Geometry: Double-anchor (Inficon-style)

• Q-Factor: >80,000 typical (in air)

• Temperature Limit: Up to 150°C (crystal only; housing-dependent)

• Pack Size: 10 crystals per box

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Electrode Coating Options

• Gold (Au): Inert, highly stable in reactive or corrosive environments; preferred in ALD and organic materials

• Silver (Ag): Delivers the highest Q-factor and cleanest signal; excellent for vacuum-based optical and PVD systems

• Aluminum (Al): Strong thermal match with quartz and ideal for processes involving aluminum or elevated temperatures

Each coating is applied via precision vacuum deposition and inspected for uniformity and edge definition.

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Packaging

Our custom packaging is designed to protect each crystal’s sensitive center region during storage and handling:

• Top Shell: Pharmaceutical-grade PETG

• Base Tray: Hand-cleaned polystyrene

• No anti-static PETG, which can leach polymer agents over time

• Crystals are positioned to avoid any plastic contact within 3 mm of the measurement zone

The result is a cleanroom-ready packaging system that preserves surface integrity and performance.

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Applications

• Optical monitoring in PVD and E-beam evaporation

• ALD film growth validation and endpoint control

• Semiconductor and photonic device fabrication

• Research-grade film deposition and metrology

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Disclaimer:
Inficon, Maxtek, Sigma Instruments, Sycon, and other trademarks mentioned are the property of their respective owners. Phillip Technologies is not affiliated with or endorsed by these companies. References to third-party brands are provided for compatibility and descriptive purposes only.

Part Numbers:

TAN06IGP: 6 MHz Polished Inficon Gold
TAN06IAP: 6 MHz Polished Inficon Alloy
TAN06ISP:  6 MHz Polished Inficon Silver